Hitachi S-4800 Quick Start Manual

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HIGH RESOLUTION FIELD EMISSION

SCANNING ELECTRON MICROSCOPE: HITACHI S-4800

BEAM ALIGNMENT PROCEDURE

1. Set V

and I

to desired value.

acc

2. Move stage to desired working distance with Z manual knob on sample chamber.

The distance is in mm; this is the distance between the pole piece and the sample

surface.

3. Under the SEM tab in the software interface, set WD (working distance).

4. Select focus mode UHR.

5. Press F2 on the keyboard while the cursor is over the view window to degauss the

objective lens. This should be done every time focus is greatly changed (by changing

working distance), or V

6. Adjust FOCUS/BRIGHTNESS/CONTRAST knobs to obtain the best image

possible.

7. Check that I

has not dropped from selected value. If it has, press SET.

8. Click Align button along top row of screen to open align dialog box.

Note: In general you want to align the beam at twice the magnification that you will

be using for your images.

9. Align beam:

a. Click the Beam Align radio button.

b. Adjust BRIGHTNESS/CONTRAST knobs to obtain a clear disc. Use

STIGMA/ALIGNMENT knobs X and Y to center disc on the target.

10. Align aperture:

a. Click the Aperture Align radio button.

b. Use STIGMA/ALIGNMENT knobs X and Y to minimize motion in image.

11. Align Stigma Align.X and Stigma Align.Y:

a. Click the Stigma Align.X radio button.

b. Use STIGMA/ALIGNMENT knobs X and Y to minimize motion in image.

c. Repeat for Stigma Align.Y radio button.

12. Select Off radio button to turn off alignment functions.

or I

are changed.

acc

Page 1 HIGH RESOLUTION FIELD EMISSION SCANNING ELECTRON MICROSCOPE: HITACHI S-4800 BEAM ALIGNMENT PROCEDURE 1. Set V and I to desired value. 2. Move stage to desired working distance with Z manual knob on sample chamber. The distance is in mm; this is the distance between the pole piece and the sample surface.
Page 2 13. Adjust FOCUS knobs for best image. 14. Correct lens astigmatism by adjusting STIGMA/ALIGNMENT knobs X and Y knobs for best image. When the astigmatism is out of adjustment, the image will be “smeared”. Round objects will appear oblong. Adjust STIGMA/ALIGNMENT knobs X and Y so that this “smearing”...